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�Ӱ�ԭ��

The Facility

2015-10-09 13.36.32

�Ӱ�ԭ�� University’s NanoFab (formerly The Facility for Nanoscience, Surfaces, and Sensor Interfaces) is a nanofabrication facility located in the MintoCASE building on �Ӱ�ԭ�� University campus. MC5033 houses the cleanroom and the wetlab for sample preparation and characterization is adjacent in room MC5041B

Our mandate is to work in collaboration with academia and industrial partners for collaborative research and development projects as well as for-fee manufacturing, characterization, and consulting services.

Jointly funded initially by the and with 20% contributions from various industries and tool manufacturers, the facility features a 600 ft², ISO 6 – 7 (class 1,000 – 10,000) clean-room facility housing a variety of nanoscale fabrication and characterization tools and instruments, listed in the menu to the left.

The NanoFab enjoys a close relationship with the , and thus has access to full CMOS fabrication, including plasma and thermal CVD.