Chemistry of ALD – A TextbookYou can ,
I hope it will be the backbone of a course on ALD chemistry; it isn鈥檛 comprehensive concerning precursors or surface chemistry, but rather, it will go through the core concepts of understanding ALD from a chemistry point of view. |
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听and the Amazon author page can be found .听
2026
| 112. An, K.; Lawford, K. G.; Gu, B.; Patil, A. H.; Rogers, A. D.; Barry, S. T.; Lee, H.-B.-R. Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum.听J. Mater. Chem. C 2026 14,10006 鈥� 10019. DOI: |
| 111. 听Goodwin, E. R.; Barry, S. T. Surface ligand decomposition for practical applications. Encycl. Interfacial Chem. 2026听in press. DOI: |
2025
| 110. 听Bakiro, M. Y.; Lomax, J. T.; Nguyen, J.; Alonso, M. P.; Parsons, G. N.; Barry, S. T. Molecular Layer Deposition of an Aluminum Formate Metal鈭扥rganic Framework for Selective Carbon Dioxide Capture.听Chem. Mater.听2025听37, 9451鈥�9459. DOI:听 |
| P7. Crudden, C. M.; Barry, S. T.; Goodwin, E. R.; Ragogna, P. J.; Lomax, J. T.; Hedberg, Y.; Yang, M. S.; Senanayake, W.; Auzeroll, J.; Laundry-Mottiar, L.; Suduwella, T. M. Carbene-Functionalized Composite Materials.听Patent Application听2025. No.: US 12,409,473 B2 |
| 109. Goodwin, E.; Bentley, J. N.; Bakiro, M.; Aloisio, M. D.; Lomax, J. T.; Singh, I.; Veinot, A. J.; Nezamzedah, A.; Ragogna, P. J.; Crudden, C. M.; Barry, S. T. Benzimidazolium Hydrogen Carbonate Salts 鈥� Investigation of Thermal Properties in the Context of Small Molecule Inhibitors.听J. Vac. Sci. Technol. A听2025听43, 062403. DOI:听 Preprint DOI:听 |
| 108. Goodwin, E.; Davies, M.; Bakiro, M.; Desroche, E.; Tumino, F.; Aloisio, M. D.; Crudden, C. M.; Ragogna, P. J.; Karttunen, M.; Barry, S. T. Atomic Layer Restructuring of Gold Surfaces by N-Heterocyclic Carbenes over Large Surface Areas.听ACS Nano听2025听19, 15617鈥�15626. DOI:听 Preprint DOI:听 |
| 107. Meng, X.; Elam J. W.; Barry, S. T. Editorial for Focus on Emerging Processes and Applications of Atomic and Molecular Layer Deposition.听Nanotechnology听2025听36, 090201. DOI:听 |
2024
| 106. Watanabe, L. K.; Rogers, A. D.; Atherton, M. T.; Lawford, K. G.; Gu, B.; Chun, S.; Lee, S.; Lee, D.; Lee, H.-B.-R.; Barry, S. T. Insights into the Thermal Decomposition Mechanism of Molybdenum(VI) Iminopyridine Adducts.听Chem. Mater.听2024听36, 11985鈥�11995. DOI:听 |
| 105. Land, M. A.; Lawford, K. G.; Watanabe, L. K.; Atherton, M.; Barry, S. T. Put a Ring on It: Improving the Thermal Stability of Molybdenum Imides through Ligand Rigidification.听Organometallics听2024听43, 2381鈥�2386. DOI:听 Preprint DOI:听 |
| 104. Lomax, J. T.; Goodwin, E.; Aloisio, M. D.; Veinot, A. J.; Singh, I.; Shiu, W.-T.; Bakiro, M.; Bentley, J.; DeJesus, J. F.; Gordon, P. G.; Liu, L.; Barry, S. T.; Crudden, C. M.; Ragogna, P. J. Deposition of N-Heterocyclic Carbenes on Reactive Metal Substrates – Applications in Area-Selective Atomic Layer Deposition.听Chem. Mater.听2024听36, 5500鈥�5507. DOI:听 |
| 103.听Rowe, C.; Kashyap, A.; Sharma, G.; Goyal, N.; Alauzun, J. G.; Barry, S. T.; Ravishankar, N.; Soni, A.; Eklund, P.; Pedersen, H.; Ramanath, G. Nanomolecularly-induced Effects at Titania/Organo-Diphosphonate Interfaces for Stable Hybrid Multilayers with Emergent Properties.听ACS Appl. Nano Mater.听2024听7, 11225鈥�11233. DOI:听 |
2023
| P6. Barry, S. T.; Ba膷i膰, G.; Dezelah, C.; Blanquart, T.; Vervuurt, R. H. J.; Gordon P. G. Vapor deposition processes, reactants and deposition assemblies.听Patent Application听2023. No.:听 |
| 102. Lawford, K. G.; Land, M. A.; Goodwin, E.; Robertson, K. N.; Barry, S. T. Synthesis, Characterization, and Single-Crystal X鈥憆ay Structures of Refractory Metal Compounds as Precursors for the Single-Source Chemical Vapor Deposition of Metal Nitrides.听Inorg. Chem.听2023听62, 21061鈥�21073. DOI:听 Preprint DOI:听 |
| P5.听Crudden, C. M.; Barry, S. T.; Ragogna, P. J.; Singh, I.; Veinot, A. R.; Goodwin, E. R.; Gordon, P. G.; Zhang, T.; McBreen, P.; Lomax, J. Method of Selective Deposition of Small Molecules on Metal Surfaces.听Patent Application听2023. No.:听 |
| 101.听Land, M. A.; Lomax, J. T.; Barry, S. T. Low-Temperature, Single-Source, Chemical Vapor Deposition of Molybdenum Nitride Thin Films.听J. Vac. Sci. Technol. A听2023听41, 053403. DOI:听 Preprint DOI:听 |
| 100.听Land, M. A.; Robertson, K. N.; Cyburne, J.; Barry, S. T. Disturbance of Intermolecular Forces: Eutectics as a New Tool for the Preparation of Vapor-Phase Deposition Precursors.听Phys. Chem. Chem. Phys.听2023听25, 8336-8340. DOI:听 Preprint DOI:听 |
| 99. Varga, A. C.; Barry S. T. Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition.听J. Vac. Sci. Technol. A听听2023听41, 022403. DOI:听 |
| 98. Lomax, J. T.; Goodwin, E.; Gordon, P. G.; McGuiness, C.; De Campo, F.; Barry, S. T.; Ragogna, P. J. Plasma-Enhanced Molecular Layer Deposition of Phosphane鈥揈ne Polymer Films.听Chem. Mater.听2023, 35,听1579鈥�1585. DOI:听 Preprint DOI: |
| 97. Land, M. A.; Dimova, D.; Robertson, K. N.; Barry, S. T. Cut-and-Pasting Ligands: The Structure/Function Relationships of a Thermally Robust Mo(VI) Precursor.听J. Vac. Sci. Technol. A听2023听41, 012403. DOI: Preprint DOI:听 |
2022
| Samii, R.; Fransson, A.; Zanders, D.; Varga, A.; Barry, S. T.; Ojam盲e, L.; Kessler, V.; O’Brien, N. Synthesis, Structure and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition.听ChemRxiv听2022. Preprint DOI:听 |
| 96.听Land, M. A.; Ba膷i膰, G.; Robertson, K. N.; Barry, S. T. The Origin of Decomposition in a Family of Molybdenum Precursor Compounds.听Inorg. Chem.听2022听42, 16607鈥�16621. DOI:听 Preprint DOI:听 |
| 95.听Zanders, D.; Masuda, J. D.; Lowe, B.;听 Curtis, S.; Devi, A.; Barry, S. T. An Unusual Tri-coordinate Co(II) Silylamide with Potential for Chemical Vapor Deposition Processes.听Z. Anorg. Allg. Chem.听2022, e202200249. DOI:听 |
| 94.听Popov, G.; Ba膷i膰, G.; Van Dijck, C.; Junkers, L. S.; Wei脽, A.; Mattinen, M.; Vihervaara, A.; Chundak, M.; Jalkanen, P.; Mizohata, K.; Leskela, M.; Masuda, J. D.; Barry, S. T.; Ritala, M.; Kemell, M. L. Atomic Layer Deposition of PbCl2, PbBr2听and mixed lead halide (Cl, Br, I) PbXnY2-n听thin films.听DaltonTrans.听2022听51, 15142-15157. DOI:听 |
| 93.听Wree, J.-L.; Glauber, J.-P.; Zanders, D.; Rogalla, D.; Becher, M.; Griffiths, M. B. E.; Ostendorf, A.; Barry, S. T.; Ney, A.; Devi A. Ferromagnetic Cobalt Disulfide: A CVD Pathway Toward High-Quality and Phase-Pure Thin Films.听ACS Appl. Electron. Mater.听2022听4, 3772鈥�3779. DOI:听 |
| 92.听Veinot, A. J.; Griffiths, M. B. E.; Singh, I.; Zurakowski, J. A.;听 Lummis, P. A.; Barry, S. T.;听 Crudden, C. M. Evaluating the thermal behaviour of benzimidazolylidene sources for thin-film applications.听Mater. Adv.听2022听3, 6446-6450. DOI:听 |
| 91.听(Invited) Barry, S. T.; Gordon, P. G.; Vandalon, V. Common Precursors and Surface Mechanisms for Atomic Layer Deposition.听Comprehensive Organometallic Chemistry IV听2022,听14, 534-552. DOI:听 |
| 90.听Land, M. A.; Ba膷i膰, G.; Robertson, K. N.; Barry, S. T. Thermal Stability and Decomposition Pathways in Volatile Molybdenum(VI) Bis-Imides.听Inorg. Chem.听2022听61, 4980鈥�4994. DOI:听 Preprint DOI:听 |
| 89.听Varga, A. C.; Barry, S. T. Modified 3D-Printed Architectures: Effects of Coating by Alumina on ABS.听J. Vac. Sci. Technol. A听2022听40, 022407. DOI:听 |
2021
| P4.听Barry, S. T.; Wasslen, Y. A. M.; Rahtu, A. H. ALD of metal-containing films using cyclopentadienyl compounds.听Patent听2021. No.:听听(US) |
| B1.听Barry, S. T.; Chemistry of Atomic Layer Deposition, De Gruyter,听2021. Website:听 |
| 88.听Zanders, D.; Boysen, N.; Land, M. A.; Obenl眉neschlo脽, J.; Masuda, J. D.; Mallick, B.; Barry, S. T.; Devi, A. Co(II) Amide, Pyrrolate, and Aminopyridinate Complexes: Assessment of their Manifold Structural Chemistry and Thermal Properties听Eur. J. Inorg. Chem.听2021, p. 5119鈥�5136. DOI:听 Preprint DOI:听 |
| 87.听Samii, R.; Zanders, D.; Fransson, A.; Ba膷i膰, G.; Barry, S. T.; Ojam盲e, L.; Kessler, V; Pedersen, H.; O’Brien, N. Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides as Potential Vapor Deposition Precursors.听Inorg. Chem.听2021听60, 12759鈥�12765. DOI:听 Preprint DOI:听 |
| 86.听Pedersen, H.; Barry, S. T.; Sundqvist, J. Green CVD 鈥� Toward a sustainable philosophy for thin film deposition by chemical vapor deposition.听J. Vac. Sci. Technol. A听2021听39,听051001. DOI:听 |
| 85.听Buttera, S.C.; Rouf, P.; Deminskyi, P.; O’Brien, N. J.; Pedersen, H.; Barry, S. T. Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High-Efficiency Precursor Design.听Inorg. Chem.听2021听60,听11025鈥�11031. DOI:听 Preprint DOI:听 |
| 84.听Zanders, D.; Liu, J.; Obenl眉neschlo脽, J.; Bock, C.; Rogalla, D.; Mai, L.; Nolan, M.; Barry, S. T.; Devi, A. Cobalt Metal ALD: Understanding the Mechanism and Role of Zinc Alkyl Precursors as Reductants for Low Resistivity Co Thin Films.听Chem. Mater.听2021听33, 5045鈥�5057. DOI:听 Preprint DOI:听 |
| 83.听Griffiths, M. B. E.; Zanders, D.; Land, M. A.; Masuda, J. D.; Devi, A.; Barry, S. T. (tBuN)SiMe2NMe2听– a new听N,N’–魏2-monoanionic ligand for atomic layer deposition precursors.听J. Vac. Sci. Technol. A听听2021听39, 032409. DOI:听 |
| 82.听Griffiths, M. B. E.; Dubrawski, Z. S.; Gordon, P. G.; Junige, M.; Barry, S. T. Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD.J. Vac. Sci. Technol. A听2021听39, 022401. DOI:听 Preprint DOI:听 |
2016 – 2020
| 81.听Popov, G.; Ba膷i膰, G.; Mattinen, M.; Manner, M.; Lindstr枚m, H.; Sepp盲nen, H.; Suihkonen, S.; Vehkam盲ki, M.; Kemell, M.; Jalkanen, P.; Mizohata, K.; R盲is盲nen, J.; Leskel盲, M.; Koivula, H. M.; Barry, S. T.; Ritala, M. Atomic Layer Deposition of PbS Thin Films at Low Temperatures.听Chem. Mater.听2020听32, 8216鈥�8228. DOI:听 |
| 80.听Van Daele, M.; Griffiths, M. B. E.; Minjauw, M. M.; Barry, S. T.; Detavernier, C.; Dendooven, J. Reaction Mechanism of the Me3AuPMe3-H2听Plasma-Enhanced ALD Process.听Phys. Chem. Chem. Phys.听2020听22, 11903-11914. DOI:听 |
| 79.听Zanders, D.; Ba膷i膰, G.; Leckie, D.; Odegbesan, O.; Rawson, J. M.; Masuda, J. D.; Devi, A.; Barry, S. T. A Rare Low鈥怱pin Co(IV) Bis(尾鈥恠ilyldiamide) with High Thermal Stability: Steric Enforcement of a Doublet Configuration.听Angew. Chem. Int. Ed.听2020听59, 14138 鈥�14142. DOI:听 Preprint DOI:听 |
| 78.听(Invited) Land, M. A.; Robertson, K. N.; Barry, S. T. Ligand Assisted Volatilization and Thermal Stability of [(t-BuN=)2MoCl2]2. Organometallics听2020听39,听916鈥�927. DOI:听 Preprint DOI:听 |
| 77.听Hashemi, F. S. M.; Grillo, F.; Ravikumar, V. R.; Benz, D.; Shekhar, A.; Griffiths, M. B. E.; Barry, S. T.; van Ommen, J. R. Thermal Atomic Layer Deposition of Gold Nanoparticles: Controlled Growth and Size Selection for Photocatalysis.听Nanoscale听2020听12, 9005-9013. DOI:听 Preprint DOI:听 |
| 76.听Moret, J. L. T. M.; Griffiths, M. B. E.; Frijns, J. E. B. M.; Terpstra, B. E.; Wolterbeek, H. T.;听 Barry, S. T.; Denkova, A. G.;听 van Ommen, J. R. Lutetium coating of nanoparticles by atomic layer deposition.听J. Vac. Sci. Technol. A听2020听38, 022414. DOI:听 |
| 75.听Ba膷i膰, G.; Rankine, C. D.; Masuda, J. D.; Wann, D. A.; Barry, S. T. Supramolecular Organization and Evaporation of Polymeric Tin Trifluoroacetates.听Inorg. Chem.听2020听59, 996鈥�1005. DOI:听 Preprint DOI:听 |
| 74.听Griffiths, M. B. E.; Dubrawski, Z. S.; Ba膷i膰, G.; Masuda, J. D.; Japanhuge, A.; Zeng, T.; Barry, S. T. Controlling Thermal Stability and Volatility of Organogold(I) Compounds for Vapor Deposition with Complementary Ligand Design. Eur. J. Inorg. Chem.听2019听46听4927鈥�4938. DOI:听 Preprint DOI:听 |
| 73.听(Invited) Gordon, P. G.; Ba膷i膰, G.; Lopinski, G. P.; Barry, S. T. Workfunction of Al-Doped ZnO films deposited by atomic layer deposition.听J. Mater. Res.听2019听1-6. DOI:听 Preprint DOI:听 |
| 72.听Van Daele, M.; Griffiths, M. B. E.; Raza, A.; Minjauw, M. M.; Solano, E.; Feng, J.-Y.; Ramachandran, R. K.; Clemmen, S.; Baets, R.; Barry, S. T.; Detavernier, C.; Dendooven, J. Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature. ACS Appl. Mater. Interfaces,听2019听11,听37229鈥�37238. DOI:听 |
| 71.听Guay, J.-M.; Lesina, A. C.; Killaire, G.; Gordon, P. G.; Hahn, C.; Barry, S. T.; Ramunno, L.; Berini, P.; Weck, A.听Laser-written colours on silver: optical effect of alumina coating.听Nanophotonics听2019听8,听807鈥�822. DOI:听 Preprint DOI:听 |
| 70.听Chen, B.; Coyle, J. P.; Barry, S. T.; Zaera, F. Rational Design of Metalorganic Complexes for the Deposition of Solid Films: Growth of Metallic Copper with Amidinate Precursors.听Chem. Mater.听2019, 31, 1681鈥�1687. DOI:听 |
| 69.听R枚nnby, K.; Buttera, S. C.; Rouf, P.; Barry, S. T.; Ojam盲e, L.; Pedersen, H. Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride.听J. Phys. Chem. C听2019,听123, 6701鈥�6710. DOI:听 Preprint DOI:听 |
| Rouf, P.; O鈥橞rien, N. J.; Buttera, S. C.; Barry, S. T.; Pedersen, H.听Deposition Study of Indium Trisguanidinate as a Possible Indium Nitride Precursor.听ChemRxiv听Preprint听2018. Preprint DOI:听 |
| 68.听Barry, S. T. Group 11 Thin Films by Atomic Layer Deposition.听Material Matters听2018,听13(2), 60. Link:听 |
| 67.听Ritala, M.;听听Lee, Buriak, J. M.; Lee, H.-B.-R.; Barry, S. T.听In Honor of Professor Markku Leskel盲,听Chem. Mater.听2018,听30,听4469鈥�4474. DOI:听 |
| 66.听Ba膷i膰*, G.; Zanders, D.; Mallick, B.; Devi, A.; Barry, S. T.听Designing Stability into Thermally Reactive Plumbylenes.听Inorg. Chem.听2018听57,听8218 鈥� 8226. DOI:听 Preprint DOI:听 |
| 65.听Barry, S. T.听Chemists, It Is Time To Embrace Preprints.听Chem. Mater.听2018,听30,听2859 鈥� 2859. DOI:听 |
| 64.听Guay, J.-M.; Killaire, G.; Gordon, P. G.; Barry, S. T.; Berini, P.; Weck, A. Passivation of plasmonic colors on bulk silver by atomic听layer deposition of aluminum oxide.听Langmuir听2018,听34, 4998 鈥� 5010. DOI:听 |
| 63.听Barry, S. T.; Teplyakov, A. V.; Zaera, F.听The chemistry of inorganic precursors during the chemical deposition of films on solid surfaces.听Acc. Chem. Res.听2018,听51, 800 鈥� 809. DOI:听 |
| 62.听Buttera, S. C.; R枚nnby, K.; Pedersen, H.; Ojam盲e, L.; Barry, S. T. Thermal study of an indium trisguanidinate as a possible indium nitride precursor.听J. Vac. Sci. Technol. A听2018听36, 01A101. DOI:听 |
| 61.听Coyle, J. P.; Sirianni, E. R.; Korobkov, I.; Yap, G. P. .; Dey, G.; Barry, S. T.听Study of Monomeric Copper Complexes Supported by N-Heterocyclic and Acyclic Diamino Carbenes.听Organometallics听2017,听36, 2800 鈥� 2810. DOI:听 |
| P3.听Adermann, T.; Loeffler, D.; Limburg, C.; Abels, F.; Wilmer, H.; Gill, M. A.; Griffiths, M. B. E.; Barry, S. T. Process for the Generation of Thin Inorganic Films,听Patent Application听2016. No.:听. |
| 60.听Guay, J.-M.; CalaLesina, A.; Gordon, P. G.; Baxter, J.; Barry, S. T.; Ramunno, L.; Berini, P.; Weck, A. Plasmonic Coloring of Noble Metals Rendered by Picosecond Laser Exposure.听Proc. of SPIE听2017, 10094. DOI:听 |
| 59.听Buttera, S. C.; Mandia, D. J.; Barry, S. T. Tris(dimethylamido)aluminum(III): An Overlooked Atomic Layer Deposition Precursor.听J. Vac. Sci. Technol. A听2017,听35,听01B128-1 – 01B128-7. DOI:听 |
| 58.听Chen, B.; Duan, Y.; Yao, Y.; Ma; Q.; Coyle, J. P.; Barry, S. T.; Teplyakov, A. V.; Zaera; F. Activation of the Dimers and Tetramers of Metal Amidinate Atomic Layer Deposition Precursors Upon Adsorption on Silicon Oxide Surfaces.听J. Vac. Sci. Technol. A听2017,听35,听01B124-1 – 01B124-8. DOI:听 |
| 57.听Zhang, W.; Dey, G.; Mandia, D. J.; Barry, S. T. Using a Vapor-Phase Surfactant to Control Gold Metal Plate Growth.听Adv. Mater. Interfaces听2017,听1600864. DOI:听 |
| 56.听(Invited) Pallister, P. J.; Barry, S. T. Surface Chemistry of Group 11 Atomic Layer Deposition Precursors on Silica using Solid-State Nuclear Magnetic Resonance Spectroscopy.听J. Chem. Phys.听2017,听146, 052812. DOI:听 |
| 55.听Yao, Y.; Coyle, J. P.; Barry, S. T.; Zaera, F. Thermal Decomposition of Copper Iminopyrrolidinate Atomic Layer Deposition (ALD) Precursors on Silicon Oxide Surfaces.听J. Phys. Chem. C听2016,听120,听14149 – 14156. DOI:听 |
| 54.听(Invited) Koponen, S. E.; Gordon, P. G.; Barry, S. T. Principles of Precursor Design for Vapour Deposition Methods.听Polyhedron听2016,听108,听59 鈥� 66. DOI:听 |
| 52.听Griffiths, M. B. E.; Pallister, P. J.; Mandia, D. J; Barry, S. T. Atomic Layer Deposition of Gold Metal.听Chem. Mater.听2016,听28,听44 鈥� 46. DOI:听 |
2011 – 2015
| 51.听Mandia, D. J.; Zhou, W.; Ward, M. J.; Joress, H.; Sims, J. J.; Giorgi, J. B.; Albert, J.; Barry, S. T. The Effect of ALD-grown Al2O3听on the Refractive Index Sensitivity of CVD Gold-Coated Optical Fiber Sensors.听Nanotechnology听2015,听26,听434002, 1 鈥� 12. DOI:听 |
| 50.听Mandia, D. J.; Zhou, W.; Wells, A.; Albert, J.; Barry, S. T. Metallic Nanocoatings on Optical Fibers as a Sensor Platform.听ECS Trans.2015,听69,听171 鈥� 179. DOI:听 |
| 49.听Griffiths, M. B. E.; Koponen, S. E.; Mandia, D. J.; McLeod, J. F.; Coyle, J. P.; Sims, J. J.; Giorgi, J. B.; Sirianni, E. R.; Yap, G. P. A.; Barry, S. T. Surfactant Directed Growth of Gold Metal Nanoplates by Chemical Vapor Deposition.听Chem. Mater.听2015,听27,听6116 鈥� 6124. DOI:听 |
| 48.听Pallister, P. J.; Buttera, S. C.; Barry, S. T. Self-seeding gallium oxide nanowire growth by pulsed chemical vapour deposition.听Phys. Status Solidi A听2015,听212,听1514 鈥� 1518. DOI:听 |
| 47.听Zhou, W.; Mandia, D. J.; Barry, S. T.; Albert, J. Absolute Near-Infrared Refractometry With a Calibrated Tilted Fiber Bragg Grating.听Opt. Lett.听2015,听40,听1713 鈥� 1716. DOI:听 |
| 46.听(Invited) Mandia, D. J.; Zhou, W.; Albert, J.; Barry, S. T. Chemical Vapor Deposition on Optical Fibers: Tilted Fiber Bragg Gratings as Real-Time Sensing Platforms.听Chem. Vap. Deposition听2015,听21,听4 鈥� 20. DOI:听 |
| 45.听(Invited) Gordon, P. G.; Kurek, A.; Barry, S. T. Trends in Copper Precursor Development for CVD and ALD Applications.听ECS JSS听2015,听4,听N3188 鈥� N3197. DOI:听 |
| 44.听Huynh, K.; Laneman, S. A.; Laxman, R.; Gordon, P. G.; Barry, S. T. New Zr-containing precursors for the atomic layer deposition of ZrO2.听J. Vac. Sci. Technol. A听2015,听33,听013001-1 鈥� 013001-4. DOI:听 |
| 43.听Zhou, W.; Mandia, D. J.; Barry, S. T.; Albert J. Anisotropic Effective Permittivity of an Ultrathin Gold Coating on Optical Fiber in air, water and saline solutions.听Opt. Express听2014,听22,听31665 鈥� 31676. DOI:听 |
| 42.听Hagen, D. J.; Povey, I.; Rushworth, S.; Wrench, J. S.; Keeney, L.; Schmidt, M.; Petkov, M.; Barry, S. T.; Coyle J. P.; Pemble, M. E. Atomic Layer Deposition of Cu Using a Carbene-Stabilized Cu (I) Silylamid.听J. Mater. Chem. C听2014,听2,听9205 鈥� 9214. DOI:听 |
| 41.听Mandia, D. J.; Zhou, W.; Ward, M. J.; Joress, H.; Giorgi, J. B.; Gordon, P. G.; Albert, J.; Barry, S. T. Chemical Vapor Deposition of Anisotropic Ultrathin Gold Films on Optical Fibers: Real-Time Sensing by Tilted Fiber Bragg Gratings and Use of a Dielectric Pre-Coating.听Proc. SPIE 9288, Photonics North听2014,听92880M-1 鈥� 92880M-10. DOI:听 |
| 40.听(Invited) Kurek, A.; Gordon, P. G.; Karle, S.; Devi, A.; Barry, S. T. Recent Advances Using Guanidinate Ligands for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) Applications.听Aust. J. Chem.听2014,听67,听989 鈥� 996. DOI:听 |
| 39.听Zhou, W.; Mandia, D. J.; Griffiths, M. B. E.; Barry, S. T.; Albert, J. Anomalous refractive index of ultrathin gold nanoparticle film coated on tilted fiber Bragg grating.听Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors听2014,听9157,听91573Y-1 鈥� 91573Y-4. DOI:听 |
| 38.听Pallister, P. J.; Buttera, S. C.; Barry, S. T.; Quantitative Surface Coverage Calculations via Solid-State NMR for Thin Film Depositions: A Case Study for Silica and a Gallium Amidinate.听J. Phys. Chem. C听2014,听118,听1618 鈥� 1627. DOI:听 |
| 37.听Zhou, W.; Mandia, D. J; Griffiths, M. B. E.; Barry, S. T.;听Albert, J.; Effective Permittivity of Ultrathin Chemical Vapor Deposited Gold Films on Optical Fibers at Infrared Wavelengths.听J. Phys. Chem. C听2014,听118,听670 鈥� 678. DOI:听 |
| 36.听Coyle, J. P.; Gordon, P. G.; Wells, A. P.; Mandia, D. J.; Sirianni, E. R.; Yap, G. P. A.; Barry, S. T. Thermally Robust Gold and Silver Iminopyrrolidinates for Chemical Vapour Deposition of Metal Films.听Chem. Mater.听2013,听25,听4566听鈥� 4573. DOI:听 |
| 35.听Kim, T.; Yao, Y.; Coyle, J. P.; Barry, S. T.; Zaera, F. Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces.听Chem. Mater.听2013,听25,听3630听鈥� 3639. DOI:听 |
| 34.听(Invited) Mandia, D. J.; Griffiths, M. B. E.; Zhou, W.; Gordon, P. G.; Albert, J.; Barry, S. T.听In Situ Deposition Monitoring by a Tilted Fiber Bragg Grating Optical Probe: Probing Nucleation in Chemical Vapour Deposition of Gold.听Physics Procedia听2013,听46,听12 鈥� 20. DOI:听 |
| 33.听Coyle, J. P.; Dey, G.; Sirianni, E. R.; Kemell, M. L.; Yap, G. P. A.; Ritala, M.; Leskel盲, M.; Elliott, S. D.; Barry, S. T.听Deposition of Copper By Plasma-Enhanced Atomic Layer Deposition Using a Novel N-Heterocyclic Carbene Precursor.听Chem. Mater.听2013,听25,听1132听鈥� 1138. DOI:听 |
| 32.听(Invited) Barry, S. T. Amidinates, Guanidinates and Iminopyrrolidinates: Understanding Precursor Thermolysis to Design a Better Ligand.听Coord. Chem. Rev.听2013,听257,听3192 鈥� 3201. DOI:听 |
| 31.听Coyle, J. P.; Pallister, P. J.; Kurek, A.; Sirianni, E. R.; Yap, G. P. A.; Barry, S. T. Copper Iminopyrrolidinates: A Study of Thermal and Surface Chemistry.听Inorg. Chem.听2013, 52,听910 鈥� 917. DOI:听 |
| P2. Barry, S. T.; Coyle, J. P.; Clark, T. J.; Hastie, J. J. M. Group 11 Mono-Metallic Precursor Compounds and Use Thereof in Metal Deposition.听Patent听2012. No.:听听(US) |
| 30.听Zhou, W.; Mandia, D. J.; Griffiths, M. B. E.; Bialiayeu, A.; Zhang, Y.; Gordon, P. G.; Barry, S. T.; Albert, J.听Polarization-Dependent Properties of the Cladding Modes of a Single Mode Fiber Covered with Gold Nanoparticles.听Opt. Express听2013,听21,听245 鈥� 255. DOI:听 |
| 29.听Coyle, J. P.; Kurek, A.; Pallister, P. J.; Sirianni, E. R.; Yap, G. P. A.; Barry, S. T.听Preventing Thermolysis: Precursor Design for Volatile Copper Compounds.听Chem. Commun.听2012,听48, 10440 鈥� 10442. DOI:听 |
| 28.听Gordon, P. G.; Baribeau, R.; Barry, S. T.听Goniocolorimetric Study of Aluminum Oxide Films Deposited by Atomic Layer Deposition.听Thin Solid Films听2012,听520,听245 鈥� 255. DOI:听 |
| 27.听Gordon, P. G.; Ward, M. J.; Heikkila, M. J.; Monillas, W. H.; Yap, G. P. A.; Ritala, M.; Leskal盲, M.; Barry, S. T.听Chemical Vapour Deposition of In2O3听Thin Films from a tris-Guanidinate Indium Precursor.听Dalton Trans.听2011,听40,听9425 鈥� 9430. DOI:听 |
| 26.听Barry, S. T.; Kurek, A.听Metal-Assisted Chemical Etching Using Sputtered Gold: A Simple Route to Black Silicon.听Sci. Technol. Adv. Mater.听2011,听12,听045001-1 鈥� 04500-4. DOI:听 |
| 25.听Whitehorne, T. J. J.; Coyle, J. P.; Mahmood, A.; Monillas, W. H.; Yap, G. P. A.; Barry, S. T.听Group 11 Amidinates and Guanidinates: Potential Precursors for Vapour Deposition.听Eur. J. Inorg. Chem.听2011,听21, 3240 鈥� 3247. DOI:听 |
| 24.听(Invited) Shao, L.-Y.; Coyle, J. P.; Barry, S. T.; Albert, J.听Anomalous permittivity and plasmon resonances of copper nanoparticle conformal coatings on optical fibers.听Opt. Mater. Express听2011,听1,听128 鈥� 137. DOI:听 |
2005 – 2010
| 23.听Demtchenko, S.; McGarry, S.; Gordon, P. G.; Barry, S. T.; Tarr, N. G.Characterization and assessment of a novel hybrid organic/inorganic metal-insulator-semiconductor structure for photovoltaic applications.听Proc.SPIE听2010,听7750, 7750-1听鈥撎�7750-9. DOI:听 |
| 22.听Wasslen, Y. A.; Kurek, A.; Johnson, P. A.; Pigeon, T. C.; Monillas, W. H.; Yap, G. P. A.; Barry, S. T.听Heteroleptic Iminopyrrolidinates of Aluminium.听Dalton Trans.听2010,听39,听9046 鈥� 9054. DOI:听 |
| 21.听Coyle, J. P.; Johnson, P. A.; DiLabio, G. A.; Barry, S. T.; Muller, J.听Gas-Phase Thermolysis of a Guanidinate Precursor of Copper Studied by Matrix Isolation, Time-of-Flight Mass Spectrometry, and Computational Chemistry听Inorg. Chem.听2010,听49, 2844 鈥� 2850. DOI:听 |
| 20.听Wasslen, Y. A.; Tois, E.; Haukka, S.; Kreisel, K. A.; Yap, G. P. A.; Halls, M. D.; Barry, S. T.听A Family of Heteroleptic Titanium Guanidinates: Synthesis, Thermolysis, and Surface Reactivity.听Inorg. Chem.听2010,听49, 1976 鈥� 1982. DOI:听 |
| 19.听Brazeau A. L.; Barry, S. T.听Atomic Layer Deposition of Aluminum Oxide Thin Films from a Heteroleptic, Amidinate-Containing Precursor.听Chem. Mater.听2008,听20, 7287 鈥� 7291. DOI:听 |
| 18.听Dornan, P.; Rowley, C. N.; Priem, J.; Barry, S. T.; Burchell, T. J.; Woo T. K.; Richeson, D. S.听Atom efficient cyclotrimerization of dimethylcyanamide catalyzed by aluminium amide: a combined experimental and theoretical investigation.听Chem. Commun.听2008, 3645 鈥� 3647. DOI:听 |
| 17.听Ziffle, L. C.; Kenney, A. P.; Barry, S. T.; M眉ller, J.听Thermal fragmentation of the guanidinato aluminum amide precursor [Me2NC(NiPr)2]Al(NMe2)2: An investigation of reactive species by matrix-isolation FTIR spectroscopy and time-of-flight mass spectrometry.听Polyhedron听2008,听27, 1832 鈥� 1840. DOI:听 |
| 16.听Coyle, J. P.; Monillas, W. H.; Yap, G. P. A.; Barry, S. T.听Synthesis and Thermal Chemistry of Copper (I) Guanidinates.听Inorg. Chem.听2008,听47, 683 鈥� 689. DOI:听 |
| 15.听Brazeau, DiLabio, A. L.; G. A.; Kreisel, K. A.; Monillas, W. H.; Yap, G. P. A.; Barry, S. T.听Theoretical and experimental investigations of ligand exchange in guanidinate ligand systems for group 13 metals.听Dalton Trans.听2007,听30, 3297 鈥� 3304. DOI:听 |
| 14.听Brazeau, A. L.; Wang, Z.; Rowley, C. N.; Barry, S. T.听Synthesis and Thermolysis of Aluminum Amidinates: A Ligand-Exchange Route for New Mixed-Ligand Systems.听Inorg. Chem.听2006,听45, 2276 鈥撎� 2281. DOI:听 |
| 13.听Kenney, A. P.; Yap, G. P. A.; Richeson, D. S.; Barry, S. T.听 The Insertion of Carbodiimides into Al and Ga Amido Linkages. Guanidinates and Mixed Amido-Guanidinates of Aluminum and Gallium.听Inorg. Chem.听2005,听44, 2926 鈥� 2933. DOI:听 |
| 12.听Rowley, C. N.; DiLabio, G. A.; Barry, S. T.听Theoretical and Synthetic Investigations of Carbodiimide Insertions into Al-CH3and Al-N(CH3)2听Bonds.听Inorg. Chem.听2005,听44, 1983 鈥� 1991. DOI:听 |
Se谩n’s Post-Docs and PhD (12)
11. Li, Z.; Barry, S. T.; Gordon, R. G. Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal.听Inorg. Chem. 2005, 44, 1728 鈥� 1735.
DOI:
10. Gordon, R. G.; Barry, S. T.; Barton, J. T.; Broomhall-Dillard, R. N. R. Atmospheric pressure chemical vapor deposition of electrochromic tungsten oxide films. Thin Solid Films听2001, 392, 231 鈥� 235.
DOI:
P1. Gordon, R. G.; Barry, S. T.; Broomhall-Dillard, R. N. R.听Liquid sources for cvd of group 6 metals and metal compound.听Patent Application听2001.
No.:听
9. Gordon, R. G.; Barry, S. T.; Broomhall-Dillard, R. N. R.; Wagner, V. A.; Wang, Y. Volatile liquid precursors for the chemical vapor deposition (CVD) of thin films containing tungsten. MRS Proceedings听2001, 612,听D9.12/1 鈥� D9.12/6.
DOI:
8. Gordon, R. G.; Barry, S. T.; Broomhall-Dillard, R. N. R.; Teff, D. J.听Synthesis and solution decomposition kinetics of flash-vaporizable liquid barium beta-diketonates. Adv. Mater. Opt. Electron.听2000, 10, 201 鈥� 211.
DOI:
7. Barry, S. T.; Gordon, R. G.; Wagner, V. Monomeric chelated amides of aluminum and gallium: volatile, miscible liquid precursors for CVD. MRS Proceedings听1999, 606, 83 鈥� 89.
DOI:
6. Gordon, R. G.; Barry, S. T.; Broomhall-Dillard, R. N. R.; DiCeglie, N., Jr.; Liu, X.; Teff, D. J. Synthesis and decomposition kinetics of liquid precursors for chemical vapor deposition (CVD) of barium. Proceedings – Electrochemical Society听1999, 98-23,听270 鈥� 279.
5. Gordon, R. G.; Barry, S. T.; Liu, X.; Teff, D. J. Liquid compounds for CVD of alkaline earth metals. MRS Proceedings听1999, 574,听23 鈥� 30.
DOI:
4. Barry, S. T.; Ruoff, S. A.; Ruoff, A. L. Gallium Nitride Synthesis Using Lithium Metal as a Nitrogen Fixant.Chem. Mater.听1998, 10, 2571 鈥� 2574.
DOI:
3. Barry, S. T.; Belhumeur, S.; Richeson, D. S. Thermally-Induced Transformations of Gallium and Indium Alkyl Phosphido Complexes: Dealkylsilylation Routes to MP (M = Ga, In). Organometallics听1997, 16, 3588 鈥� 3592.
DOI:
2. Barry, S. T.; Richeson, D. S. Preparation and characterization of mixed alkyl amido complexes of gallium. J. Organomet. Chem. 1996, 510, 103 鈥� 108.
DOI:
1. Barry, S. T.; Richeson, D. S. Designated molecular deconstruction: the facile transformation of Ga(N(SiMe3)2)(OSiMe3)2py (py = pyridine) to GaN. Chem. Mater. 1994, 6, 2220听鈥� 2221.
DOI:听