{"id":54,"date":"2015-11-12T19:22:54","date_gmt":"2015-11-12T19:22:54","guid":{"rendered":"http:\/\/carleton.ca\/fanssi\/?page_id=54"},"modified":"2026-08-04T09:54:57","modified_gmt":"2026-08-04T13:54:57","slug":"atomic-layer-deposition","status":"publish","type":"page","link":"https:\/\/carleton.ca\/nanofab\/atomic-layer-deposition\/","title":{"rendered":"ALD"},"content":{"rendered":"\n<section class=\"w-screen px-6 cu-section cu-section--white ml-offset-center md:px-8 lg:px-14\">\n    <div class=\"space-y-6 cu-max-w-child-5xl  md:space-y-10 cu-prose-first-last\">\n\n            <div class=\"cu-textmedia flex flex-col lg:flex-row mx-auto gap-6 md:gap-10 my-6 md:my-12 first:mt-0 max-w-5xl\">\n        <div class=\"justify-start cu-textmedia-content cu-prose-first-last\" style=\"flex: 0 0 100%;\">\n            <header class=\"font-light prose-xl cu-pageheader md:prose-2xl cu-component-updated cu-prose-first-last\">\n                                    <h1 class=\"cu-prose-first-last font-semibold !mt-2 mb-4 md:mb-6 relative after:absolute after:h-px after:bottom-0 after:bg-cu-red after:left-px text-3xl md:text-4xl lg:text-5xl lg:leading-[3.5rem] pb-5 after:w-10 text-cu-black-700 not-prose\">\n                        ALD\n                    <\/h1>\n                \n                                \n                            <\/header>\n\n                    <\/div>\n\n            <\/div>\n\n    <\/div>\n<\/section>\n\n<figure class=\"wp-block-image alignright\"><img loading=\"lazy\" decoding=\"async\" width=\"200\" height=\"252\" src=\"http:\/\/carleton.ca\/fanssi\/wp-content\/uploads\/picosun_tool.jpg\" alt=\"picosun_tool\" class=\"wp-image-96\" srcset=\"https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/sites\/277\/picosun_tool.jpg 200w, https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/sites\/277\/picosun_tool-160x202.jpg 160w\" sizes=\"auto, (max-width: 200px) 100vw, 200px\" \/><\/figure>\n\n\n\n\n\n<p class=\"wp-block-paragraph\">Atomic Layer Deposition (ALD) &nbsp;is a thin film technique for depositing \u00c5ngstr\u00f6m level thicknesses of a variety of materials (<a href=\"http:\/\/www.sciencedirect.com\/science\/article\/pii\/S1369702114001436\" target=\"_blank\" rel=\"noopener noreferrer\">here is an excellent, open-source review<\/a>) . We have three industrial tools, all Picosun reactors. One is a thermal tool equipped with a high-temperature precursor source, one is a similar thermal tool with a very large chamber, and one is a plasma tool equipped with a total of twelve possible precursor sources including three heated bubblers, an ozone source, and four different plasma sources.<\/p>\n\n\n\n<h3 id=\"thermal-tools\" class=\"wp-block-heading\">Thermal Tools<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">These tools are generally used for oxides and metals. The smaller tool has a PicoSolid booster source, letting us use precursors that require heating, and has Peltier-cooled sources for trimethyl aluminum, water, diethyl zinc, etc. &nbsp;It can handle substrates up to 150 mm in diameter, and the larger thermal tool can easily accommodate 300 mm diameter substrates.<\/p>\n\n\n\n<h3 id=\"plasma-tool\" class=\"wp-block-heading\">Plasma Tool<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Our plasma tool is equipped with several precursor lines, including two PicoSolid boosters and one PicoHot source. There is an ozone source, and plasma sources currently include O<sub>2<\/sub>, N<sub>2<\/sub>&nbsp;and H<sub>2<\/sub>. &nbsp;We can accommodate novel chemistry in both the thermal bubblers and on the plasma line.<\/p>\n\n\n\n<p class=\"has-text-align-center wp-block-paragraph\">Runs cost $100 + 100\/hr on each tool<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">If you require exotic precursors, or are curious about a discount for multiple runs, these can be incorporated into your quote. &nbsp;If you are not providing substrates, those costs can be included as well.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Atomic Layer Deposition (ALD) &nbsp;is a thin film technique for depositing \u00c5ngstr\u00f6m level thicknesses of a variety of materials (here is an excellent, open-source review) . We have three industrial tools, all Picosun reactors. One is a thermal tool equipped with a high-temperature precursor source, one is a similar thermal tool with a very large [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_cu_dining_location_slug":"","footnotes":"","_links_to":"","_links_to_target":""},"cu_page_type":[],"class_list":["post-54","page","type-page","status-publish","hentry"],"acf":{"cu_post_thumbnail":false},"_links":{"self":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/pages\/54","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/comments?post=54"}],"version-history":[{"count":2,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/pages\/54\/revisions"}],"predecessor-version":[{"id":229,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/pages\/54\/revisions\/229"}],"wp:attachment":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/media?parent=54"}],"wp:term":[{"taxonomy":"cu_page_type","embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu_page_type?post=54"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}