{"id":173,"date":"2020-01-09T16:25:21","date_gmt":"2020-01-09T21:25:21","guid":{"rendered":"https:\/\/carleton.ca\/nanofab\/?post_type=cu-people&#038;p=173"},"modified":"2020-01-09T17:21:31","modified_gmt":"2020-01-09T22:21:31","slug":"pe-ald","status":"publish","type":"cu-people","link":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/","title":{"rendered":"PE-ALD"},"content":{"rendered":"<p>Our Picosun R200 Advanced PE-ALD tool is the workhorse of the lab.<\/p>\n<p><strong>Typical substrate size and type<\/strong><\/p>\n<ul>\n<li>50-200 mm diameter wafers or similarly thin substrates.<\/li>\n<li>spacious chamber for 3D objects<\/li>\n<li>adapter for deposition on optical fibers<\/li>\n<\/ul>\n<p><strong>Processing temperature<\/strong><\/p>\n<ul>\n<li>50 \u2013 450\u00b0C<\/li>\n<\/ul>\n<p><strong>Turnkey processes<\/strong><\/p>\n<ul>\n<li>Al<sub>2<\/sub>O<sub>3<\/sub>, TiO<sub>2<\/sub>, ZnO, AZO, Au metal, Cu metal, laminate combinations<\/li>\n<li>many other processes accessible upon request<\/li>\n<\/ul>\n<p><strong>Precursors<\/strong><\/p>\n<ul>\n<li>Liquid, solid, gas, ozone, plasma(*)<\/li>\n<li>Up to 12 sources with 7 separate inlets<\/li>\n<\/ul>\n<div id=\"attachment_102\" class=\"wp-caption aligncenter\" style=\"width: 350px\"><img decoding=\"async\" loading=\"lazy\" class=\"wp-image-102\" src=\"https:\/\/carleton.ca\/fanssi\/wp-content\/uploads\/2015-10-09-13.36.32-240x320.jpg\" alt=\"\" width=\"350\" height=\"467\" srcset=\"https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/2015-10-09-13.36.32-240x320.jpg 240w, https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/2015-10-09-13.36.32-160x213.jpg 160w, https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/2015-10-09-13.36.32-768x1024.jpg 768w, https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/2015-10-09-13.36.32-400x533.jpg 400w, https:\/\/carleton.ca\/nanofab\/wp-content\/uploads\/2015-10-09-13.36.32-360x480.jpg 360w\" sizes=\"(max-width: 350px) 100vw, 350px\" \/><p class=\"wp-caption-text\">R200 in the cleanroom (drybox-integrated COVAP in the backround)<\/p><\/div>\n","protected":false},"template":"","meta":{"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","_mi_skip_tracking":false,"_exactmetrics_sitenote_active":false,"_exactmetrics_sitenote_note":"","_exactmetrics_sitenote_category":0,"_links_to":"","_links_to_target":""},"people-type":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v21.2 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>PE-ALD - CU Nanofab<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/\",\"url\":\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/\",\"name\":\"PE-ALD - CU Nanofab\",\"isPartOf\":{\"@id\":\"https:\/\/carleton.ca\/nanofab\/#website\"},\"datePublished\":\"2020-01-09T21:25:21+00:00\",\"dateModified\":\"2020-01-09T22:21:31+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/carleton.ca\/nanofab\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"People\",\"item\":\"https:\/\/carleton.ca\/nanofab\/people\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"PE-ALD\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/carleton.ca\/nanofab\/#website\",\"url\":\"https:\/\/carleton.ca\/nanofab\/\",\"name\":\"CU Nanofab\",\"description\":\"ÐÓ°ÉÔ­´´ University\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/carleton.ca\/nanofab\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"PE-ALD - CU Nanofab","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/","url":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/","name":"PE-ALD - CU Nanofab","isPartOf":{"@id":"https:\/\/carleton.ca\/nanofab\/#website"},"datePublished":"2020-01-09T21:25:21+00:00","dateModified":"2020-01-09T22:21:31+00:00","breadcrumb":{"@id":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/carleton.ca\/nanofab\/people\/pe-ald\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/carleton.ca\/nanofab\/"},{"@type":"ListItem","position":2,"name":"People","item":"https:\/\/carleton.ca\/nanofab\/people\/"},{"@type":"ListItem","position":3,"name":"PE-ALD"}]},{"@type":"WebSite","@id":"https:\/\/carleton.ca\/nanofab\/#website","url":"https:\/\/carleton.ca\/nanofab\/","name":"CU Nanofab","description":"ÐÓ°ÉÔ­´´ University","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/carleton.ca\/nanofab\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"}]}},"acf":{"First Name":"Picosun","Last Name":"PE-ALD","Title":"","Degrees":"","Extension":"","Phone":"","Email Address":"","Profile Photo":174,"Office":"","CV":"","Twitter Profile":"","LinkedIn Profile":"","Facebook Profile":"","URL":"https:\/\/www.picosun.com\/product\/r-200-advanced\/","URL Text":"Picosun"},"_links":{"self":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu-people\/173"}],"collection":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu-people"}],"about":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/types\/cu-people"}],"version-history":[{"count":3,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu-people\/173\/revisions"}],"predecessor-version":[{"id":195,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/cu-people\/173\/revisions\/195"}],"wp:attachment":[{"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/media?parent=173"}],"wp:term":[{"taxonomy":"people-type","embeddable":true,"href":"https:\/\/carleton.ca\/nanofab\/wp-json\/wp\/v2\/people-type?post=173"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}